COREMA-WT Complete system

Loading a 150 mm GaAs wafer onto the pneumatic deposition ring

COREMA-WT pneumatic deposition ring with 100 mm adaption

Charge transient after application of voltage step

M-shaped macroscopic resistivity variation

Resistivity topogram of 100 mm GaAs wafer

SiC temperature dependence of resistivity (Arrhenius plot)

Resistivity topogram of GaAs wafer

17 points measurement plan

COREMA-RM system with manual translation stage

COREMA-RM: detail with probe head and wafer chuck

Resistivity topogram of 100 mm GaAs wafer

Resistivity topogram of 100 mm GaAs wafer

Corema mobility vs. Hall mobility

Comparison of mobility data with drift mobility obtained from ionized impurity scattering

Resistivity topogram for SiC wafer with good homogeneity

Resistivity topogram for SiC wafer with low resistivity inclusions