Jan. 2000 |
COREMA-WT system
developed by Fraunhofer IAF, Freiburg |
May 2003 |
Founding of the SemiMap
Scientific Instruments GmbH, Freiburg |
Jul. 2003 |
First COREMA-RM system
installed |
Sep. 2003 |
Website published |
Apr. 2003 |
SEMI Leadership Award 2003 for Dr.
Wolfgang Jantz
[PIC] |
Feb. 2004 |
First COREMA-VT
measurement |
Jul. 2004 |
Karl Urbanek
Memorial Award 2004 for Dr. Wolfgang Jantz
[PIC] |
Oct. 2004 |
Commercial COREMA-VT
measurement up to 350°C |
Mar. 2005 |
Commercial
application of COREMA-WT to s.i. SiC and GaN |
Jul. 2006 |
Commercial application of COREMA-WT
to CdTe |
Jul. 2007 |
Elaboration of analytic tools to
characterize local inhomogeneity |
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